A few days ago, the Department of Economics and Information Technology of Anhui Province, in order to accelerate breakthroughs in the key and common technical bottlenecks restricting the development of the manufacturing industry, and promote the high-quality development of the manufacturing industry, issued the "Production-University-Research-Used Products to Make up for Shortcomings in the Key Fields of Manufacturing and Guidance for Tackling Key Common Technologies." Catalog (2021)". The "UV LED Wind Direction" found that the deep ultraviolet LED is the research and industrialization of special patterned substrate and chip preparation technology.
It is understood that the research and industrialization of special patterned substrates and chip preparation technologies for deep-ultraviolet LEDs are mainly researched on nano-patterned sapphire substrates suitable for the epitaxial growth of AlN and high-aluminum AlGaN ultraviolet LED chips to solve UVC semiconductors. The three problems of epitaxial technology, enhancement of sterilization efficiency, and improvement of heat dissipation.
Its main technical goal is to realize the preparation of nano-patterned substrates with uniform pattern size distribution. The specific pattern size: upper (lower) aperture is 700-1000 (100-300) nm, depth is 300-650nm, period 1- The microstructure of 1.4μm, the uniformity is less than 3-5%.
The second is to use a nano-scale patterned substrate to realize that the emission wavelength of the AlGaN quantum well is below 280 nm (the emission wavelength is 260-280 nm), and the internal quantum efficiency is greater than 50%. In addition, in the preparation of the UV LED chip structure, the electroluminescence wavelength is below 280 nm, the off-chip quantum efficiency is greater than 3%, and the output light power is more than 10mW. "And other issues.
Due to its ability to kill the new crown virus and its own advantages, deep ultraviolet LEDs have attracted more and more attention from the government. Earlier, the Xiamen Science and Technology Bureau of Fujian Province issued the "Guidelines for the Application of Major Science and Technology Projects (Industry and Information Technology) in Xiamen in 2021." There is one item in the chemical industry that clearly puts forward the focus on "deep ultraviolet luminescent materials and devices."
For example, Shanxi Province also supports the development of UV LEDs (click for details). In the "14th Five-Year Plan for New Equipment in Shanxi Province", it will focus on breakthroughs in the field of intelligent detection equipment such as ultraviolet LED chips, deep ultraviolet LED chips, and MiniLEDs. Technology, focusing on the research and development of full-band UV LED products, LED epitaxy products, and UV application products. At the same time, investment in research and development of sapphire growth equipment and MOCVD equipment will be increased.
Nowadays, this policy in Anhui involves ultraviolet, which once again brings good news to the industry and is of great significance to the promotion of UV LED development!
